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Resolution: standard / high Figure 6.
SEM images of the cross-sectioned nanopillars. (a) Nanoporous Si nanopillars formed from the highly doped Si, and (b) Si nanopillars with solid core and nanoporous shell formed from the lightly doped
Si after etching in λ3 solution for 10 min.
Wang et al. Nanoscale Research Letters 2013 8:42 doi:10.1186/1556-276X-8-42 |