Fabrication of the ordered arrays of Si nanopillars. (a) Schematic sketch of the fabrication process for the ordered array of nanoporous Si nanopillars, ordered array of nanoporous Si nanopillars with nanoporous base layer, and ordered array of Si nanopillars with nanporous shells. (b) SEM image of the pattern defined using SCIL. (c) SEM image of the formed Si nanopillars for the lightly doped Si wafer after MaCE (in λ3 solution for 10 min).
Wang et al. Nanoscale Research Letters 2013 8:42 doi:10.1186/1556-276X-8-42