Nano Express
Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells
1 Materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 5, Ilmenau, 98693, Germany
2 SÜSS MicroTec Lithography GmbH, Schleissheimer Str. 90, Garching, 85748, Germany
3 Center for Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Nanoscale Research Letters 2013, 8:42 doi:10.1186/1556-276X-8-42
Published: 21 January 2013Additional files
Additional file 1:
Supporting information. Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells.
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