Open Access Nano Express

Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

Dong Wang1*, Ran Ji2, Song Du1, Arne Albrecht3 and Peter Schaaf1*

1 Materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 5, Ilmenau, 98693, Germany

2 SÜSS MicroTec Lithography GmbH, Schleissheimer Str. 90, Garching, 85748, Germany

3 Center for Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany

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Nanoscale Research Letters 2013, 8:42  doi:10.1186/1556-276X-8-42

Published: 21 January 2013

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Supporting information. Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells.

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