Figure 6.

SEM images of Si nanohole arrays fabricated by Au-assisted chemical etching. (a) SEM image of Au nanodot arrays formed on Si substrate through anodic porous alumina mask. (b) Top and (c) cross-sectional SEM images of Si nanohole arrays fabricated by Au-assisted chemical etching in 5 mol dm-3 HF - 1 mol dm-3 H2O2 solution for 1 min.

Asoh et al. Nanoscale Research Letters 2013 8:410   doi:10.1186/1556-276X-8-410
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