CNTs on MEMS structure. The catalyst was deposited selectively on a comb structure parallel and perpendicular to the shadow mask. SEM images show CNTs grown with the (a) parallel and (b) perpendicular alignment between the shadow mask and the comb structure. The insets are the close-up views of the CNTs in red squares.
Na et al. Nanoscale Research Letters 2013 8:409 doi:10.1186/1556-276X-8-409