Figure 4.

3D reconstruction of the annealed Er-doped SRSO layers of APT analysis. 3D cluster-filtered distributions of chemical species (Si in red and Er in blue) in Er-doped SRSO layers annealed at 1,100°C for 1 h. For clarity, only silicon and erbium atoms which belong to clusters are represented. Two Si-ncs linked by Er-rich aggregates are shown in the inset.