|
Resolution: standard / high Figure 3.
3D reconstruction of the as-grown Er-doped SRSO layers of APT analysis. APT reconstruction of 3D distribution of silicon, oxygen, and erbium atoms in the
as-grown sample. The volume analyzed is 41×41×88 nm3
.
Talbot et al. Nanoscale Research Letters 2013 8:39 doi:10.1186/1556-276X-8-39 |