Figure 3.

3D reconstruction of the as-grown Er-doped SRSO layers of APT analysis. APT reconstruction of 3D distribution of silicon, oxygen, and erbium atoms in the as-grown sample. The volume analyzed is 41×41×88 nm3 .

Talbot et al. Nanoscale Research Letters 2013 8:39   doi:10.1186/1556-276X-8-39
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