Table 1

Conditions of deformed layers on unloading
Crystallographic orientation
(010) (101) (111)
Maximum depth of deformed layers (nm) 9.1 9.0 5.8
Recovery of the center (nm) 3.7 3.0 2.8
Description of deformed layers Thin at the center and thick at the circumference Thick at the center and thin at circumference Relatively uniform thickness

Lai et al.

Lai et al. Nanoscale Research Letters 2013 8:353   doi:10.1186/1556-276X-8-353

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