SEM images and PL spectra of the etched MQW samples using a resized nanosphere template. SEM images showing (a) the resized nanospheres with a mean diameter of approximately 480 nm and (b) the resulting SiGe/Si MQW nanodot arrays. (c) PL spectra in the wavelength range from 1.2 to 1.6 μm of the as-grown and etched SiGe/Si MQW samples fabricated using a resized nanosphere template.
Chang et al. Nanoscale Research Letters 2013 8:349 doi:10.1186/1556-276X-8-349