Figure 2.

SEM and TEM images of the starting SiGe/Si MQW sample. (a) SEM image showing an 800-nm-diameter PS nanosphere monolayer coated on the SiGe/Si MQW sample. (b) Cross-sectional TEM image showing the 50-period SiGe/Si MQWs epitaxially grown on Si.

Chang et al. Nanoscale Research Letters 2013 8:349   doi:10.1186/1556-276X-8-349
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