The modulation on luminescence of Er3+-doped silicon-rich oxide films by the structure evolution of silicon nanoclusters
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Nanoscale Research Letters 2013, 8:34 doi:10.1186/1556-276X-8-34Published: 18 January 2013
A series of silicon-rich oxide (SRO) and erbium-doped SRO (SROEr) films imbedded with structural tunable silicon nanoclusters (Si NCs) have been fabricated using sputtering followed by post-annealing. The coalescence of Si NCs is found in the films with large Si excess. The energy transfer rate between Si NCs and Er3+ is enhanced, but the luminescence efficiencies of both Si NCs and Er3+ are reduced by the coalescent microstructures. Optimization of the microstructures of Si NCs is performed, and the preferential optical performance for both Si NCs and Er3+ could be achieved when Si NCs were separated in microstructures.