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Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory

Mu-Shih Yeh, Yung-Chun Wu*, Min-Feng Hung, Kuan-Cheng Liu, Yi-Ruei Jhan, Lun-Chun Chen and Chun-Yen Chang

Nanoscale Research Letters 2013, 8:331  doi:10.1186/1556-276X-8-331

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