Open Access Nano Express

Template-assisted nanostructure fabrication by glancing angle deposition: a molecular dynamics study

Junjie Zhang1, Yongzhi Cao1*, Qiang Gao2, Chao Wu1, Fuli Yu1 and Yingchun Liang1

Author affiliations

1 Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, People's Republic of China

2 Nuclear and Radiation Safety Center, Ministry of Environmental Protection, Beijing 100082, People's Republic of China

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Citation and License

Nanoscale Research Letters 2013, 8:312  doi:10.1186/1556-276X-8-312

Published: 5 July 2013


In the present work, we investigate the pre-existing template-assisted glancing angle deposition of Al columnar structures on Cu substrate by means of molecular dynamics simulations, with a focus on examining the effect of deposition-induced template deformation on the morphologies of the fabricated structures. Our simulations demonstrate that the pre-existing templates significantly intensify the shadowing effect, which thus facilitates the formation of columnar structures under small deposition flux. The underlying deformation modes of the templates under different deposition configurations are analyzed and are correlated to the geometrical characteristics of the columnar structures. It is found that the template height-dependent deformation behavior of the templates strongly influences the morphologies of the fabricated columnar structures. Our findings provide design and fabrication guidelines for the fabrication of one-dimensional nanostructures by the template-assisted deposition technique.

Glancing angle deposition; Template; Deformation mechanism; Molecular dynamics