Figure 8.

Crystalline Si peaks in Raman spectra of SiN_xfilms for various refractive indexes. Raman spectra of the films produced by the N₂-reactive and the co-sputtering methods are displayed with empty and full symbols, respectively. The inset shows the Raman frequency redshift as a function of the crystalline Si-np average size measured by HRTEM. The curves of the RWL and BP models are shown for comparison.