Figure 5.

Evolution of the FTIR spectra of SiNxwith the refractive index. The FTIR spectra of the layers deposited by the N2-reactive (black) and the co-sputtering (gray) methods were measured with a normal incidence (a) and with an incidence angle of 65° (b).

Debieu et al. Nanoscale Research Letters 2013 8:31   doi:10.1186/1556-276X-8-31
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