|
Resolution: standard / high Figure 5.
Evolution of the FTIR spectra of SiNxwith the refractive index. The FTIR spectra of the layers deposited by the N2-reactive (black) and the co-sputtering (gray) methods were measured with a normal
incidence (a) and with an incidence angle of 65° (b).
Debieu et al. Nanoscale Research Letters 2013 8:31 doi:10.1186/1556-276X-8-31 |
