Evolution of the refractive index of SiNxthin films. The films were produced by the N2-reactive and the co-sputtering methods as a function of [N]/[Si] ratio. The data are compared with a new model (black curve) and with two models (dashed curves) but concerning hydrogenated films.
Debieu et al. Nanoscale Research Letters 2013 8:31 doi:10.1186/1556-276X-8-31