Figure 3.

Evolution of the refractive index of SiNxthin films. The films were produced by the N2-reactive and the co-sputtering methods as a function of [N]/[Si] ratio. The data are compared with a new model (black curve) and with two models (dashed curves) but concerning hydrogenated films.

Debieu et al. Nanoscale Research Letters 2013 8:31   doi:10.1186/1556-276X-8-31
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