Figure 11.

Evolution of XRD pattern of 1100°C-annealed SiNxlayers with the refractive index. XRD curves of thin films produced by the N2-reactive and the co-sputtering methods are displayed in black and gray, respectively.

Debieu et al. Nanoscale Research Letters 2013 8:31   doi:10.1186/1556-276X-8-31
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