|
Resolution: standard / high Figure 10.
Evolution of the XRD pattern of a SiNxlayer as a function of the annealing temperature.
Debieu et al. Nanoscale Research Letters 2013 8:31 doi:10.1186/1556-276X-8-31 |
|
Resolution: standard / high Figure 10.
Evolution of the XRD pattern of a SiNxlayer as a function of the annealing temperature.
Debieu et al. Nanoscale Research Letters 2013 8:31 doi:10.1186/1556-276X-8-31 |
