Figure 1.

RBS spectrum of a SiNxlayer with the corresponding SIMNRA simulation curve. The film was deposited on a Si substrate by the N2-reactive method. Surface peaks of N, O, Si, and Ar are indicated by arrows.

Debieu et al. Nanoscale Research Letters 2013 8:31   doi:10.1186/1556-276X-8-31
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