Open Access Nano Express

Structural and optical characterization of pure Si-rich nitride thin films

Olivier Debieu*, Ramesh Pratibha Nalini, Julien Cardin, Xavier Portier, Jacques Perrière and Fabrice Gourbilleau

Nanoscale Research Letters 2013, 8:31  doi:10.1186/1556-276X-8-31

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