Open Access Open Badges Nano Express

Structural and optical characterization of pure Si-rich nitride thin films

Olivier Debieu*, Ramesh Pratibha Nalini, Julien Cardin, Xavier Portier, Jacques Perrière and Fabrice Gourbilleau

Nanoscale Research Letters 2013, 8:31  doi:10.1186/1556-276X-8-31

Article Metrics

Total accesses

Article metric FAQ


  • Last 30 days: 212 accesses
  • Last 365 days: 2253 accesses
  • All time: 5100 accesses

These numbers are accesses on SpringerOpen websites only, and an underestimate of total usage. More information

Open Badges