Open Access Nano Express

Structural and optical characterization of pure Si-rich nitride thin films

Olivier Debieu*, Ramesh Pratibha Nalini, Julien Cardin, Xavier Portier, Jacques Perrière and Fabrice Gourbilleau

Nanoscale Research Letters 2013, 8:31  doi:10.1186/1556-276X-8-31

Article Metrics

2981
Total accesses

Article metric FAQ

Accesses  

  • Last 30 days: 177 accesses
  • Last 365 days: 1640 accesses
  • All time: 2981 accesses

These numbers are accesses on SpringerOpen websites only, and an underestimate of total usage. More information