Table 1

Calculated values of ripple wavelength ( λ ), feature height ( h ), and base width of mounds/facets
Angle of incidence Fluence (ions cm-2) λ (nm) Average feature height (nm) Average base width (nm)
70° 1 × 1017 34 2 -
2 × 1017 57 5 -
5 × 1017 - 16 131
10 × 1017 - 22 152
15 × 1017 - 30 199
20 × 1017 - 56 357
72.5° 1 × 1017 26 1 -
2 × 1017 27 2 -
5 × 1017 - 28 237
10 × 1017 - 50 363
15 × 1017 - 78 486
20 × 1017 - 90 525

Basu et al.

Basu et al. Nanoscale Research Letters 2013 8:289   doi:10.1186/1556-276X-8-289

Open Data