Figure 4.

AFM images of silicon exposed to 500 eV argon ions at 72.5° incidence angle. At fluences of (a) 1 × 1017, (b) 2 × 1017, (c) 5 × 1017, (d) 10 × 1017, (e) 15 × 1017, and (f) 20 × 1017 ions cm-2, respectively. The corresponding height scales for (a to f) are the following: 4, 3.6, 73.9, 85.9, 165.2, and 154.1 nm. For clarity, (a, b) have a scan size of 1 × 1 μm2, whereas (c to f) have a scan size of 2 × 2 μm2. Insets show the 2D autocorrelation functions for corresponding images.

Basu et al. Nanoscale Research Letters 2013 8:289   doi:10.1186/1556-276X-8-289
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