Energy dispersive X-ray (EDX) analysis of Si NW. (a) SEM image of the cross section, (b) aluminium cartography, (c) oxygen cartography, (d) silicon cartography, (e) gold cartography and (f) profile counts of oxygen, aluminium and silicon, along the arrow of (a). The EDX analyses were conducted at 5-kV high voltage and for a 7-mm WD.
Gorisse et al. Nanoscale Research Letters 2013 8:287 doi:10.1186/1556-276X-8-287