Open Access Nano Express

Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography system

Chen Zhang12, Kaige Wang1*, Jintao Bai1, Shuang Wang1, Wei Zhao2, Fang Yang2, Changzhi Gu3 and Guiren Wang245*

Author Affiliations

1 Institute of Photonics and Photo-technology, International Scientific and Technological Cooperation Base of Photoelectric Technology and Functional Materials and Application, Northwest University, 229 North Taibai Rd, Xi'an, 710069, People's Republic of China

2 Department of Mechanical Engineering, University of South Carolina, 300 Main St., Columbia, SC, 29208, USA

3 Institute of Physics, Chinese Academy of Sciences, 8 Zhongguancun 3rd South St, Beijing, 100190, People's Republic of China

4 Department of Physics, Northwest University, 229 North Taibai Rd, Xi'an, 710069, People's Republic of China

5 Department of Biomedical Engineering Program, University of South Carolina, 300 Main St., Columbia, SC, 29208, USA

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Nanoscale Research Letters 2013, 8:280  doi:10.1186/1556-276X-8-280

Published: 11 June 2013

Abstract

Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force microscopy technology, the average diameter of nanopillars on thin OIR906 photoresist film is about 65 nm and the smallest diameter is 48 nm, which is about 1/11 of the incident laser wavelength. Also, the influences of coma and astigmatism effects to the shape and size of nanopillar are numerically simulated by utilizing vector integral. As far as we know, it is the first time that nanopillar array is implemented by a donut-shaped 532-nm visible CW laser. The study presents a new, simple, inexpensive, and effective approach for nanopillar/pore array fabrication.