Open Access Nano Express

Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry

Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Kentaro Kawai, Kenta Arima and Mizuho Morita*

Nanoscale Research Letters 2013, 8:275  doi:10.1186/1556-276X-8-275

Accesses  

  • Last 30 days: 60 accesses
  • Last 365 days: 595 accesses
  • All time: 595 accesses