Micro-Raman spectra of as-deposited, RTA-, and CA-treated Si-rich Al2O3 films. (a) Micro-Raman spectra of as-deposited Si-rich Al2O3 films with x = 0.68 (1) and x = 0.45 (2). The deconvolution of curve 2 to four Si-phonon bands is also present. The spectra are offset for clarity. (b) Variation of micro-Raman spectra after RTA and CA treatments on the same samples.
Korsunska et al. Nanoscale Research Letters 2013 8:273 doi:10.1186/1556-276X-8-273