Refractive index variation for Si-rich Al2O3, pure amorphous Si, and Al2O3 films. (a) Refractive index variation for pure amorphous Si and Al2O3 films as well as Si-rich-Al2O3 samples with different Si content, x = 0.50 (1), 0.22 (2), and 0.05 (3). (b) Simulated variation of the refractive index, n, taken at 2 eV, versus Si content (x) in Si-rich Al2O3 (solid line). The circle symbols of this curve represent experimental n values, used for estimation of the x values.
Korsunska et al. Nanoscale Research Letters 2013 8:273 doi:10.1186/1556-276X-8-273