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Spatial resolution of confocal XRF technique using capillary optics

Maël Dehlinger1, Carole Fauquet1, Sebastien Lavandier1, Orawan Aumporn1, Franck Jandard1, Vladimir Arkadiev2, Aniouar Bjeoumikhov2 and Didier Tonneau1*

Author affiliations

1 CNRS, UMR7325, Aix-Marseille Univ., CINaM, Marseille 13288, France

2 IFG-GmbH, Rudower Chaussee 29/31, Berlin 12489, Germany

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Citation and License

Nanoscale Research Letters 2013, 8:271  doi:10.1186/1556-276X-8-271

Published: 7 June 2013


XRF (X-ray fluorescence) is a powerful technique for elemental analysis with a high sensitivity. The resolution is presently limited by the size of the primary excitation X-ray beam. A test-bed for confocal-type XRF has been developed to estimate the ultimate lateral resolution which could be reached in chemical mapping using this technique. A polycapillary lens is used to tightly focus the primary X-ray beam of a low power rhodium X-ray source, while the fluorescence signal is collected by a SDD detector through a cylindrical monocapillary. This system was used to characterize the geometry of the fluorescent zone. Capillary radii ranging from 50 μm down to 5 μm were used to investigate the fluorescence signal maximum level This study allows to estimate the ultimate resolution which could be reached in-lab or on a synchrotron beamline. A new tool combining local XRF and scanning probe microscopy is finally proposed.

X-ray fluorescence; Polycapillary; Monocapillary