Open Access Open Badges Nano Express

Programmable nanoengineering templates for fabrication of three-dimensional nanophotonic structures

Qingfeng Lin, Siu-Fung Leung, Kwong-Hoi Tsui, Bo Hua and Zhiyong Fan*

Author Affiliations

Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong SAR, China

For all author emails, please log on.

Nanoscale Research Letters 2013, 8:268  doi:10.1186/1556-276X-8-268

Published: 7 June 2013


Porous anodic alumina membranes (AAMs) have attracted great amount of attention due to their potential application as templates for nanoengineering. Template-guided fabrication and assembly of nanomaterials based on AAMs are cost-effective and scalable methods to program and engineer the shape and morphology of nanostructures and nanomaterials. In this work, perfectly ordered AAMs with the record large pitch up to 3 μm have been fabricated by properly controlling the anodization conditions and utilization of nanoimprint technique. Due to the capability of programmable structural design and fabrication, a variety of nanostructures, including nanopillar arrays, nanotower arrays, and nanocone arrays, have been successfully fabricated using nanoengineered AAM templates. Particularly, amorphous Si nanocones have been fabricated as three-dimensional nanophotonic structures with the characterization of their intriguing optical anti-reflection property. These results directly indicate the potential application of the reported approach for photonics and optoelectronics.

Large-pitch anodic alumina membranes; Programmable nanoengineering templates; Nanocones; Three-dimensional nanophotonic structures