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Open Access Nano Express

Conductive AFM for CNT characterization

Marius Toader1*, Holger Fiedler2, Sascha Hermann2, Stefan E Schulz23, Thomas Gessner23 and Michael Hietschold1

Author affiliations

1 Solid Surfaces Analysis Group, Institute of Physics, Chemnitz University of Technology, Chemnitz 09107, Germany

2 Center for Microtechnologies, Chemnitz University of Technology, Chemnitz 09126, Germany

3 Fraunhofer Institute for Electronic Nano Systems, Chemnitz 09126, Germany

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Citation and License

Nanoscale Research Letters 2013, 8:24  doi:10.1186/1556-276X-8-24

Published: 11 January 2013

Abstract

We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current–voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.

Keywords:
Multi-walled carbon nanotubes; CNT; Conductive AFM; Atomic force microscopy; Interconnect system