Table 2

Experimental parameters in EEM process
Parameters Values
Work material Quartz glass
Powder particle SiO2 2 μm φ
Pressure 0.5 Mpa
Machining time 1 min
Solution concentration 3 vol.%
Stand-off distance 0.4, 0.6, 0.8, 1.0, 1.2, 1.4, 1.6, 1.8 mm

Takei and Mimura

Takei and Mimura Nanoscale Research Letters 2013 8:237   doi:10.1186/1556-276X-8-237

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