Figure 2.

Fluid simulation results showing the flow state of the jet. Flow from the aperture to the workpiece surface in the case of a straight-flow nozzle and a focusing-flow nozzle. (a) Velocity distribution on XZ plane, straight-flow nozzle. (b) Velocity distribution on XZ plane, focusing-flow nozzle. (c) Velocity distribution on the plane, 1 μm from the workpiece surface, straight-flow nozzle. (d) Velocity distribution on the plane, 1 μm from the workpiece surface, focusing-flow nozzle. (e) Cross-sectional profile along A-A’ in (c). (f) Cross-sectional profile along B-B’ in (d).

Takei and Mimura Nanoscale Research Letters 2013 8:237   doi:10.1186/1556-276X-8-237
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