Table 2

Results of nanoprofiler and Fizeau interferometer for concave spherical mirror
Nanoprofiler Fizeau interferometer
In three dimensions PV 70.5 nm PV 70.0 nm
In two dimensions PV 40.0 nm PV 45.0 nm
Measurement range 20 × 20 mm 30 × 30 mm

Usuki et al.

Usuki et al. Nanoscale Research Letters 2013 8:231   doi:10.1186/1556-276X-8-231

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