Figure 1.

Schematic of the fabrication flow for 3D array of Si-NDs with SiC interlayer. (a) Deposition of 2-nm-thick SiC, 4-nm-thick poly-Si, and 3-nm-thick SiO2 layers. (b) Arrangement of 2D array of bio-template molecules on the surface. (c) Removal of bio-template protein shell by annealing in oxygen atmosphere. (d) NF3 treatment to remove surface SiO2 and NB etching to remove surface multilayers of poly-Si and SiC. (e) Removal of iron cores with HCl and NF3 treatment to etch remaining surface SiO2. (f) SiC deposition on Si-NDs.

Igarashi et al. Nanoscale Research Letters 2013 8:228   doi:10.1186/1556-276X-8-228
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