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Generation of high photocurrent in three-dimensional silicon quantum dot superlattice fabricated by combining bio-template and neutral beam etching for quantum dot solar cells

Makoto Igarashi, Weiguo Hu, Mohammad Maksudur Rahman, Noritaka Usami and Seiji Samukawa*

Nanoscale Research Letters 2013, 8:228  doi:10.1186/1556-276X-8-228