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Fabrication of Ni-silicide/Si heterostructured nanowire arrays by glancing angle deposition and solid state reaction

Hsun-Feng Hsu*, Wan-Ru Huang, Ting-Hsuan Chen, Hwang-Yuan Wu and Chun-An Chen

Nanoscale Research Letters 2013, 8:224  doi:10.1186/1556-276X-8-224

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