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Open Access Nano Express

Fabrication of Ni-silicide/Si heterostructured nanowire arrays by glancing angle deposition and solid state reaction

Hsun-Feng Hsu*, Wan-Ru Huang, Ting-Hsuan Chen, Hwang-Yuan Wu and Chun-An Chen

Author Affiliations

Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan

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Nanoscale Research Letters 2013, 8:224  doi:10.1186/1556-276X-8-224

Published: 10 May 2013

Abstract

This work develops a method for growing Ni-silicide/Si heterostructured nanowire arrays by glancing angle Ni deposition and solid state reaction on ordered Si nanowire arrays. Samples of ordered Si nanowire arrays were fabricated by nanosphere lithography and metal-induced catalytic etching. Glancing angle Ni deposition deposited Ni only on the top of Si nanowires. When the annealing temperature was 500°C, a Ni3Si2 phase was formed at the apex of the nanowires. The phase of silicide at the Ni-silicide/Si interface depended on the diameter of the Si nanowires, such that epitaxial NiSi2 with a {111} facet was formed at the Ni-silicide/Si interface in Si nanowires with large diameter, and NiSi was formed in Si nanowires with small diameter. A mechanism that is based on flux divergence and a nucleation-limited reaction is proposed to explain this phenomenon of size-dependent phase formation.

Keywords:
Silicide/Si heterostructured nanowire arrays; Glancing angle deposition; Size-dependent phase formation