XRD spectra of the Zn3N2 layers obtained on Si(001) as described in Table 1. The peaks belonging to the Al holder have also been identified. The inset shows the room-temperature PL of Zn3N2 layers grown on 1.8 nm Au/Si(001) at 500°C using 50 sccms NH3 (CVD1068 lowest two traces), 450 sccms NH3 (CVD1069 mid two traces) and 450 sccms NH3:50 sccms H2 (CVD1070 top two traces). The bold traces shown in the inset correspond to Zn3N2 obtained closest to Zn, and the thin ones to Zn3N2 obtained further donwstream.
Zervos et al. Nanoscale Research Letters 2013 8:221 doi:10.1186/1556-276X-8-221