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Structural and electrical characteristics of high-κ Er2O3 and Er2TiO5 gate dielectrics for a-IGZO thin-film transistors

Fa-Hsyang Chen, Jim-Long Her, Yu-Hsuan Shao, Yasuhiro H Matsuda and Tung-Ming Pan*

Nanoscale Research Letters 2013, 8:18  doi:10.1186/1556-276X-8-18