TEM images demonstrate a Schottky diode film composed of three layers on Si3N4. (1) is the Si3N4 substrate film; the diode film consists of (2) poly-Si, (3) nickel silicide, and (4) Al contact layers. (a, b) Images of different samples with similar structures obtained by the use of different microscopes.
Chizh et al. Nanoscale Research Letters 2013 8:177 doi:10.1186/1556-276X-8-177