Table 1

Fabrication depths under various scanning loads and etching temperatures (nm)
Scanning load (μN) 273 K 293 K 308 K 318 K 328 K
5 1.21 1.20 1.15 1.22 1.16
8 1.62 1.65 1.64 1.61 1.67
12 2.01 2.13 2.05 2.05 2.15

Song et al.

Song et al. Nanoscale Research Letters 2013 8:140   doi:10.1186/1556-276X-8-140

Open Data