Figure 3.

Effect of etching temperature on fabrication efficiency. The etching temperatures were set as 273, 293, 308 and 328 K. The quartz samples were scanned under the same normal load of 8 μN. Dashed lines were fitted by Equation 1.

Song et al. Nanoscale Research Letters 2013 8:140   doi:10.1186/1556-276X-8-140
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