Schematic illustration,HRTEM image,and SEM images. (a) A schematic illustration of the Si NC LED with 5.5 periods of SiCN/SiC SLs. (b) An HRTEM image of Si NC LED with 5.5 periods of SiCN/SiC SLs. The interfaces between each layer of Si NC LED with the SLs were flat and abrupt. (c) SEM image of the SiC layer surface. (d) SEM image of the SiCN layer surface.
Huh et al. Nanoscale Research Letters 2013 8:14 doi:10.1186/1556-276X-8-14