Additional file 3: Figures A2 and A3.
Figure A2. Adverse effects of SEM imaging on SML resist. The panels show (a) swelling and tearing of resist upon low magnification scan, and (b) bending of grating patterns after high magnification scan from center of the same grating patterns. Figure A3. Shrinking of SML resist surface due to SEM imaging. The panels show the micrographs (a) after first scan at low magnification, and (b) after second scan at high magnification. Observe the unexposed surfaces alongside the grating patterns.
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Mohammad et al. Nanoscale Research Letters 2013 8:139 doi:10.1186/1556-276X-8-139