Figure 5.

Comparison of the indentation force-depth curves on Si(100), Si(110), and Si(111) surfaces. Indentation force-depth curves during loading process measured by a diamond tip with R = 1 μm. The inset showed that the indentation force-depth curves on Si(100) surface during loading and unloading process overlapped with each other, suggesting that the deformation during indentation process was purely elastic.

Yu and Qian Nanoscale Research Letters 2013 8:137   doi:10.1186/1556-276X-8-137
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