Si 2p XPS spectra of samples 1, 2, 3, and 4 with varying thicknesses. (a) Sample 1 with Al2O3 thickness of 1.3 nm. (b) Sample 2 with Al2O3 thickness of 1.98 nm. (c) Sample 3 with Al2O3 thickness of 2.32 nm. (d) Sample 4 with Al2O3 thickness of 3.59 nm. The black solid line represents the original data of Si 2p spectrum; the red solid line is for the fitting curve. The blue dash line stands for the Gaussian peak of Si-C bonds and the magenta dash-dot line stands for the Gaussian peak of Si-O bonds. Both Gaussian peaks were separated from the core-level Si 2p spectrum.
Zheng et al. Nanoscale Research Letters 2013 8:116 doi:10.1186/1556-276X-8-116