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Passivation mechanism of thermal atomic layer-deposited Al2O3 films on silicon at different annealing temperatures

Yan Zhao, Chunlan Zhou*, Xiang Zhang, Peng Zhang, Yanan Dou, Wenjing Wang, Xingzhong Cao, Baoyi Wang, Yehua Tang and Su Zhou

Nanoscale Research Letters 2013, 8:114  doi:10.1186/1556-276X-8-114

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