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Passivation mechanism of thermal atomic layer-deposited Al2O3 films on silicon at different annealing temperatures

Yan Zhao, Chunlan Zhou, Xiang Zhang, Peng Zhang, Yanan Dou, Wenjing Wang, Xingzhong Cao, Baoyi Wang, Yehua Tang and Su Zhou

Nanoscale Research Letters 2013, 8:114 doi:10.1186/1556-276X-8-114


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